中国物理B ›› 2005, Vol. 14 ›› Issue (3): 610-614.doi: 10.1088/1009-1963/14/3/033

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Optical properties of SrTiO3 thin films prepared by metalorganic decomposition

马建华1, 孟祥建2, 孙璟兰3, 林铁4, 石富文5, 褚君浩6   

  1. (1)National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China; (2)National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200084, China; State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China; (3)National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200085, China; (4)National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200086, China; (5)National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200087, China; (6)National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200088, China
  • 收稿日期:2004-09-08 修回日期:2004-10-12 出版日期:2005-03-02 发布日期:2005-03-02
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos 60221502 and 60223006) and Shanghai R&D Foundation for Applied Materials (Grant No 0316).

Optical properties of SrTiO3 thin films prepared by metalorganic decomposition

Ma Jian-Hua (马建华)a, Meng Xiang-Jian (孟祥建)ab, Sun Jing-Lan (孙璟兰)a, Lin Tie (林铁)a, Shi Fu-Wen (石富文)a, Chu Jun-Hao (褚君浩)a   

  1. a National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China; b State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China
  • Received:2004-09-08 Revised:2004-10-12 Online:2005-03-02 Published:2005-03-02
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos 60221502 and 60223006) and Shanghai R&D Foundation for Applied Materials (Grant No 0316).

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摘要： SrTiO3 thin films were deposited on vitreous silica substrates by metalorganic decomposition (MOD). The films are polycrystalline cubic in structure with the lattice constants of a=0.39nm. Their optical constants (refractive index n and extinction coefficient k) were calculated by the envelope method from the transmittance spectra in the wavelength range of 190nm to 1100nm. The refractive index of the present films is found to be higher than that of the other SrTiO3 films prepared by RF sputtering, sol—gel and chemical vapour deposition. The dispersion of the refractive index in the films follows the single electronic oscillator model with oscillator strength (S0) of 0.88×1014m-2 and oscillator energy (E0

关键词: optical properties, SrTiO3 thin films, metalorganic decomposition

Abstract: SrTiO3 thin films were deposited on vitreous silica substrates by metalorganic decomposition (MOD). The films are polycrystalline cubic in structure with the lattice constants of a=0.39nm. Their optical constants (refractive index n and extinction coefficient k) were calculated by the envelope method from the transmittance spectra in the wavelength range of 190nm to 1100nm. The refractive index of the present films is found to be higher than that of the other SrTiO3 films prepared by RF sputtering, sol—gel and chemical vapour deposition. The dispersion of the refractive index in the films follows the single electronic oscillator model with oscillator strength (S0) of 0.88×1014m-2 and oscillator energy (E0

Key words: optical properties, SrTiO3 thin films, metalorganic decomposition

中图分类号:  (Insulators)

  • 78.66.Nk
68.55.-a (Thin film structure and morphology) 78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)) 61.05.cp (X-ray diffraction) 78.40.Ha (Other nonmetallic inorganics) 81.15.Lm (Liquid phase epitaxy; deposition from liquid phases (melts, solutions, And surface layers on liquids))