中国物理B ›› 2005, Vol. 14 ›› Issue (11): 2335-2337.doi: 10.1088/1009-1963/14/11/032

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Extraction of optical constants and thickness of nanometre scale TiO2 film

杨莺歌, 刘丕均, 王英, 张亚非   

  1. National Key Laboratory of Nano/Micro Fabrication Technology,Bio-X DNA Computer Consortium,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University,Shanghai
  • 收稿日期:2005-03-04 修回日期:2005-07-28 出版日期:2005-11-20 发布日期:2005-11-20
  • 基金资助:
    Project supported by Shanghai Municipal Commission for Science and Technology (Grant No 03DZ14025) and National Basic Research Program of China (Grant No 2006CB300406).

Extraction of optical constants and thickness of nanometre scale TiO2 film

Yang Ying-Ge (杨莺歌), Liu Pi-Jun (刘丕均), Wang Ying (王英), Zhang Ya-Fei (张亚非)   

  1. National Key Laboratory of Nano/Micro Fabrication Technology, Bio-X DNA Computer Consortium, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China
  • Received:2005-03-04 Revised:2005-07-28 Online:2005-11-20 Published:2005-11-20
  • Supported by:
    Project supported by Shanghai Municipal Commission for Science and Technology (Grant No 03DZ14025) and National Basic Research Program of China (Grant No 2006CB300406).

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摘要： TiO$_{2}$ thin films were deposited on glass substrates by sputtering in a conventional rf magnetron sputtering system. X-ray diffraction pattern and transmission spectrum were measured. The curves of refraction index and extinction coefficient distributions as well as the thickness of films calculated from transmission spectrum were obtained. The optimization problem was also solved using a method based on a constrained nonlinear programming algorithm.

关键词: TiO2 thin films, pointwise constrained optimization approach, constrained nonlinear programming, optical constants, parameters extraction

Abstract: TiO$_{2}$ thin films were deposited on glass substrates by sputtering in a conventional rf magnetron sputtering system. X-ray diffraction pattern and transmission spectrum were measured. The curves of refraction index and extinction coefficient distributions as well as the thickness of films calculated from transmission spectrum were obtained. The optimization problem was also solved using a method based on a constrained nonlinear programming algorithm.

Key words: TiO2 thin films, pointwise constrained optimization approach, constrained nonlinear programming, optical constants, parameters extraction

中图分类号:  (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))

  • 78.20.Ci
68.55.-a (Thin film structure and morphology) 78.66.Nk (Insulators)