Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles

doi:10.1088/1674-1056/25/4/048101

中国物理B ›› 2016, Vol. 25 ›› Issue (4): 48101-048101.doi: 10.1088/1674-1056/25/4/048101

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles

Jin-Long Jiang(姜金龙), Yu-Bao Wang(王玉宝), Qiong Wang(王琼), Hao Huang(黄浩), Zhi-Qiang Wei(魏智强), Jun-Ying Hao(郝俊英)

1 Department of Physics, Lanzhou University of Technology, Lanzhou 730050, China;
2 State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

收稿日期:2015-10-13 修回日期:2015-12-01 出版日期:2016-04-05 发布日期:2016-04-05
通讯作者: Jin-Long Jiang E-mail:golden_dragon@126.com
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 51105186).

Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles

Jin-Long Jiang(姜金龙)¹, Yu-Bao Wang(王玉宝)¹, Qiong Wang(王琼)¹, Hao Huang(黄浩)¹, Zhi-Qiang Wei(魏智强)¹, Jun-Ying Hao(郝俊英)²

1 Department of Physics, Lanzhou University of Technology, Lanzhou 730050, China;
2 State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Received:2015-10-13 Revised:2015-12-01 Online:2016-04-05 Published:2016-04-05
Contact: Jin-Long Jiang E-mail:golden_dragon@126.com
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 51105186).

摘要/Abstract

摘要： The a-C and a-C:H films are deposited on silicon surfaces modified with and without nickel nanoparticles by using mid-frequency magnetron sputtering. The microstructures and morphologies of the films are analyzed by Raman spectroscopy and atomic force microscopy. Field emission behaviors of the deposited films with and without nickel nanoparticles modification are comparatively investigated. It is found that the hydrogen-free carbon film exhibits a high field emission current density and low turn-on electric field compared with the hydrogenated carbon film. Nickel modifying could increase the current density, whereas it has no significant effect on the turn-on electric field. The mechanism of field electron emission of a sample is discussed from the surface morphologies of the films and nickel nanoparticle roles in the interface between film and substrate.

关键词: DLC films, field emission, magnetron sputtering, nickel nanoparticles modification

Abstract: The a-C and a-C:H films are deposited on silicon surfaces modified with and without nickel nanoparticles by using mid-frequency magnetron sputtering. The microstructures and morphologies of the films are analyzed by Raman spectroscopy and atomic force microscopy. Field emission behaviors of the deposited films with and without nickel nanoparticles modification are comparatively investigated. It is found that the hydrogen-free carbon film exhibits a high field emission current density and low turn-on electric field compared with the hydrogenated carbon film. Nickel modifying could increase the current density, whereas it has no significant effect on the turn-on electric field. The mechanism of field electron emission of a sample is discussed from the surface morphologies of the films and nickel nanoparticle roles in the interface between film and substrate.

Key words: DLC films, field emission, magnetron sputtering, nickel nanoparticles modification

中图分类号: (Carbon/carbon-based materials)

81.05.U-

79.70.+q (Field emission, ionization, evaporation, and desorption) 81.15.Cd (Deposition by sputtering)

姜金龙, 王玉宝, 王琼, 黄浩, 魏智强, 郝俊英. Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles[J]. 中国物理B, 2016, 25(4): 48101-048101.

Jin-Long Jiang(姜金龙), Yu-Bao Wang(王玉宝), Qiong Wang(王琼), Hao Huang(黄浩), Zhi-Qiang Wei(魏智强), Jun-Ying Hao(郝俊英). Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles[J]. Chin. Phys. B, 2016, 25(4): 48101-048101.

参考文献 27

[1]	Xu J, Xu P, Wei O Y, Chen X, Guo P, Li J, Piao X, Wang M and Sun Z 2015 Appl. Phys. Lett. 106 073501
[2]	Robertson J 1997 Thin Solid Films 296 61
[3]	Ahmed S F, Moon M W and Lee K R 2008 Appl. Phys. Lett. 92 193502
[4]	Xu J, Huang X H, Li Z F, Li W and Chen K J 2003 Diamond Relat. Mater. 12 2016
[5]	Xie W G, Chen J, Chen J, Deng S Z, She J C, and Xu N S 2007 J. Appl. Phys. 101 084315
[6]	Zanin H, May P W, Hamanaka M H M O and Corat E J 2013 ACS Appl. Mater. Interfaces 5 12238
[7]	Dwivedi N, Kumar S, Carey J D, Tripathi R K, Malik H K and Dalai M K 2013 ACS Appl. Mater. Interfaces 5 2725
[8]	Wan S H, Wang L P, Zhang J Y and Xue Q J 2009 Appl. Surf. Sci. 255 3817
[9]	Zhang P, Li R S, Yang H, Feng Y C and Xie E Q 2012 Solid State Sci. 14 715
[10]	Li R S, Xie E Q, Zhou M, Zhang Z X, Wang T and Lu B A 2008 Appl. Surf. Sci. 255 2787
[11]	Ling X M, Zhang P Z, Li R S, Fan D W and Yao X M 2013 Surf. Interface Anal. 45 943
[12]	Wang Q, Li S L and Wan S H 2012 Physica E: Low Dimensional Systems and Nanostructures 46 89
[13]	Wei S B, Shao T M and Xu J 2012 Surf. Coat. Technol. 206 3944
[14]	Hart A, Satyanarayana B S, Milne W I and Robertson J 1999 Appl. Phys. Lett. 74 1594
[15]	Erdemir A and Donnet C 2006 J. Phys. D: Appl. Phys. 39 311
[16]	Zhong M, Zhang C H and Luo J B 2008 Appl. Surf. Sci. 254 6742
[17]	Li J, Chen J T, Luo B M, Yan X B and Xue Q J 2012 AIP Adv. 2 022101
[18]	Ferrari A C and Robertson J 2000 Phys. Rev. B 61 14095
[19]	Jiang J L, Wang Q, Huang H, Zhang X, Wang Y B and Geng Q F 2014 J. Inorg. Mater. 29 941
[20]	Jiang J L, Hao J Y, Wang P and Liu W M 2010 J. Appl. Phys. 108 033510
[21]	Casiraghi C, Ferrari A C and Robertson J 2005 Phys. Rev. B 72 085401
[22]	Siliva S R P, Carey J D, Guo X, Tsang W M and Poa C H P 2005 Thin Solid Films 482 79
[23]	Park K C, Moon J H, Chung S J, Oh M H, Milne W I and Jang J 1996 9th International Vacuum Microelectronics Conference (IVMC'96), 1996, St. Petersburg, 268
[24]	Satyanarayana B S, Hart A, Milne W I and Robertson J 1997 Appl. Phys. Lett. 71 1430
[25]	Fowler R H and Nordheim L 1928 Proc. R. Soc. A 119 173
[26]	Yang J, Yan X, Chen J, Sun D and Xue Q 2014 Chin. Chem. Lett. 25 375
[27]	Zhang X H, Gong L, Liu K, Cao Y, Xiao X, Sun W, Hu X, Gao Y, Chen J, Zhou J and Wang Z L 2010 Adv. Mater. 22 5292

Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles

Field emission properties of a-C and a-C:H films deposited on silicon surfaces modified with nickel nanoparticles

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 27

相关文章 15

Metrics

本文评价

推荐阅读 0

[1]	Zi-Hao Chen(陈子豪), Yong-Sheng Wang(王永胜), Ning Zhang(张宁), Bin Zhou(周兵), Jie Gao(高洁), Yan-Xia Wu(吴艳霞), Yong Ma(马永), Hong-Jun Hei(黑鸿君), Yan-Yan Shen(申艳艳), Zhi-Yong He(贺志勇), and Sheng-Wang Yu(于盛旺). Effects of preparation parameters on growth and properties of β-Ga₂O₃ film[J]. 中国物理B, 2023, 32(1): 17301-017301.
[2]	Xiufang Yang(杨秀芳), Shengsheng Zhao(赵生盛), Qian Huang(黄茜), Cao Yu(郁超), Jiakai Zhou(周佳凯), Xiaoning Liu(柳晓宁), Xianglin Su(苏祥林),Ying Zhao(赵颖), and Guofu Hou(侯国付). Sub-stochiometric MoO_x by radio-frequency magnetron sputtering as hole-selective passivating contacts for silicon heterojunction solar cells[J]. 中国物理B, 2022, 31(9): 98401-098401.
[3]	Jian-Mei Li(李健梅), Dong Hao(郝东), Li-Huan Sun(孙丽欢), Xiang-Qian Tang(唐向前), Yang An(安旸), Xin-Yan Shan(单欣岩), and Xing-Hua Lu(陆兴华). Enhanced photon emission by field emission resonances and local surface plasmon in tunneling junction[J]. 中国物理B, 2022, 31(11): 116801-116801.
[4]	Qi-Xun Guo(郭奇勋), Zhong-Xu Ren(任中旭), Yi-Ya Huang(黄意雅), Zhi-Chao Zheng(郑志超), Xue-Min Wang(王学敏), Wei He(何为), Zhen-Dong Zhu(朱振东), and Jiao Teng(滕蛟). Effects of post-annealing on crystalline and transport properties of Bi₂Te₃ thin films[J]. 中国物理B, 2021, 30(6): 67307-067307.
[5]	Yao Wang(王垚), Sheng-Wang Yu(于盛旺), Yan-Peng Xue(薛彦鹏), Hong-Jun Hei(黑鸿君), Yan-Xia Wu(吴艳霞), and Yan-Yan Shen(申艳艳). Effect of metal nanoparticle doping concentration on surface morphology and field emission properties of nano-diamond films[J]. 中国物理B, 2021, 30(6): 68101-068101.
[6]	Xia Wang(王霞), Wei-Fang Gu(古卫芳), Yong-Feng Qiao(乔永凤), Zhi-Yong Feng(冯志永), Yue-Hua An(安跃华), Shao-Hui Zhang(张少辉), and Zeng Liu(刘增). Band offsets and electronic properties of the Ga₂O₃/FTO heterojunction via transfer of free-standing Ga₂O₃ onto FTO/glass[J]. 中国物理B, 2021, 30(11): 114211-114211.
[7]	汪俊, 王玉全, 刘聪, 孙美玲, 王操, 尹广超, 贾福超, 牟艳男, 刘笑林, 杨海滨. Influence of CdS films synthesized by different methods on the photovoltaic performance of CdTe/CdS thin film solar cells[J]. 中国物理B, 2020, 29(9): 98802-098802.
[8]	王玉红, 王明利, 沈琳, 朱艳英, 孙鑫, 史国超, 许晓娜, 李瑞峰, 马万里. A general method for large-scale fabrication of Cu nanoislands/dragonfly wing SERS flexible substrates[J]. 中国物理B, 2018, 27(1): 17801-017801.
[9]	H Mahmodi,M R Hashim. Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge_1-xSn_x films on Si substrate[J]. 中国物理B, 2017, 26(5): 56801-056801.
[10]	赵蔚, 杜霖元, 刘林林, 孙亚利, 柳志伟, 滕晓云, 谢娟, 刘匡, 于威, 傅广生, 高超. Low-temperature phase transformation of CZTS thin films[J]. 中国物理B, 2017, 26(4): 46402-046402.
[11]	杨汛, 甘海波, 田颜, 许宁生, 邓少芝, 陈军, 陈焕君, 梁世东, 刘飞. An easy way to controllably synthesize one-dimensional SmB₆ topological insulator nanostructures and exploration of their field emission applications[J]. 中国物理B, 2017, 26(11): 118103-118103.
[12]	张永欣, 刘飞, 申承民, 李军, 邓少芝, 许宁生, 高鸿钧. Preparation of patterned boron nanowire films with different widths of unit-cell and their field emission properties[J]. 中国物理B, 2016, 25(8): 88102-088102.
[13]	Z A Umar, R Ahmad, R S Rawat, M A Baig, J Siddiqui, T Hussain. Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device[J]. 中国物理B, 2016, 25(7): 75201-075201.
[14]	张永欣, 刘飞, 申承民, 杨天中, 李军, 邓少芝, 许宁生, 高鸿钧. Preparation of few-layer graphene-capped boron nanowires and their field emission properties[J]. 中国物理B, 2016, 25(7): 78101-078101.
[15]	赵艳, 高伟, 徐博, 李英爱, 李红东, 顾广瑞, 殷红. Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas[J]. 中国物理B, 2016, 25(10): 106801-106801.