中国物理B ›› 2014, Vol. 23 ›› Issue (11): 114601-114601.doi: 10.1088/1674-1056/23/11/114601

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

A new model for film bulk acoustic wave resonators

李玉金, 元秀华   

  1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
  • 收稿日期:2014-03-05 修回日期:2014-07-12 出版日期:2014-11-15 发布日期:2014-11-15
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant No. 61275081).

A new model for film bulk acoustic wave resonators

Li Yu-Jin (李玉金), Yuan Xiu-Hua (元秀华)   

  1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
  • Received:2014-03-05 Revised:2014-07-12 Online:2014-11-15 Published:2014-11-15
  • Contact: Yuan Xiu-Hua E-mail:yuanxh@hust.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant No. 61275081).

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摘要：

Based on cavity resonance and sandwich composite plate theory, this paper presents a universal three-dimensional (3D) theoretical model for frequency dispersion characterization and displacement profile shapes of the film bulk acoustic resonator (FBARs). This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke (MBVD) model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.

关键词: film bulk acoustic wave resonators, acoustic field vibration, cavity resonance, piezoelectric composite

Abstract:

Based on cavity resonance and sandwich composite plate theory, this paper presents a universal three-dimensional (3D) theoretical model for frequency dispersion characterization and displacement profile shapes of the film bulk acoustic resonator (FBARs). This model provides results of FBAR excited thickness-extensional and flexure modes, and the result of frequency dispersion is proposed in which the thicknesses and impedance of the electrodes and the piezoelectric material are taken into consideration; its further simplification shows good agreement with the modified Butterworth-Van-Dyke (MBVD) model. The displacement profile reflects the vibration stress distribution of electrode shapes and the lateral resonance effect, which depends on the axis ratio of the electrode shapes a/b. The results are consistent with the 3D finite element method modeling and laser interferometry measurement in general.

Key words: film bulk acoustic wave resonators, acoustic field vibration, cavity resonance, piezoelectric composite

中图分类号:  (Vibrations and mechanical waves)

  • 46.40.-f
68.60.Bs (Mechanical and acoustical properties) 62.25.Jk (Mechanical modes of vibration)