Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

doi:10.1088/1674-1056/23/10/106803

›› 2014, Vol. 23 ›› Issue (10): 106803-106803.doi: 10.1088/1674-1056/23/10/106803

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇下一篇

Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

肖夏, 陶冶, 孙远

School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China

收稿日期:2013-11-20 修回日期:2014-05-26 出版日期:2014-10-15 发布日期:2014-10-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 60876072) and the Tianjin Research Program of Application Foundation and Advanced Technology, China (Grant No. 10JCZDJC15500).

Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

Xiao Xia (肖夏), Tao Ye (陶冶), Sun Yuan (孙远)

School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China

Received:2013-11-20 Revised:2014-05-26 Online:2014-10-15 Published:2014-10-15
Contact: Xiao Xia E-mail:xiaxiao@tju.edu.cn
About author:68.35.Ct; 43.35.+d; 78.20.Bh
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 60876072) and the Tianjin Research Program of Application Foundation and Advanced Technology, China (Grant No. 10JCZDJC15500).

摘要/Abstract

摘要： The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical characteristics of the thin low dielectric constant (low-k) film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is investigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young's moduli of the Black Diamond^TM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square (RMS) of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.

关键词: low-k film, mechanical character detection, rough surface, rough interface, surface acoustic wave

Abstract: The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical characteristics of the thin low dielectric constant (low-k) film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is investigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young's moduli of the Black Diamond^TM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square (RMS) of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.

Key words: low-k film, mechanical character detection, rough surface, rough interface, surface acoustic wave

中图分类号: (Interface structure and roughness)

68.35.Ct

43.35.+d (Ultrasonics, quantum acoustics, and physical effects of sound) 78.20.Bh (Theory, models, and numerical simulation)

肖夏, 陶冶, 孙远. Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves[J]. , 2014, 23(10): 106803-106803.

Xiao Xia (肖夏), Tao Ye (陶冶), Sun Yuan (孙远). Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves[J]. Chin. Phys. B, 2014, 23(10): 106803-106803.

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Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

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