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NUCLEATION ENHANCEMENT OF DIAMOND FILMS BY ION BOMBARDING AND ELECTRON EMITTING EFFECTS
王万录, 廖克俊, 张振刚, 廖梅勇, M.C.POLO, G.SANCHEZ, J.ESTEVE
1997 (7):
517-521.
doi: 10.1088/1004-423X/6/7/006
摘要
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1123 )
PDF(172KB)
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Applying a proper negative bias-voltage onto the substrate, on which diamond lilm is deposited by chemical vapor deposition technique, can greatly improve the nucleation density. While nucle-ation enhancing, both the ion bombardment and electron emission may play an important role sepa-rately. However, for the highest nucleation density, both of the two effects must act together.
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