Performance enhancement of IGZO thin-film transistors via ultra-thin HfO
2 and the implementation of logic device functionality
Xuyang Li(栗旭阳), Bin Liu(刘斌), Xianwen Liu(刘贤文), Shuo Zhang(张硕), Congyang Wen(温丛阳), Jin Zhang(张进), Haifeng Liang(梁海锋), Guangcai Yuan(袁广才), Jianshe Xue(薛建设), and Zhinong Yu(喻志农)
Performance enhancement of IGZO thin-film transistors via ultra-thin HfO
2 and the implementation of logic device functionality
Xuyang Li(栗旭阳), Bin Liu(刘斌), Xianwen Liu(刘贤文), Shuo Zhang(张硕), Congyang Wen(温丛阳), Jin Zhang(张进), Haifeng Liang(梁海锋), Guangcai Yuan(袁广才), Jianshe Xue(薛建设), and Zhinong Yu(喻志农)
中国物理B
.
2025, (7): 76101
-076101
.
DOI: 10.1088/1674-1056/adcb22