Experimental demonstration of silicon nitride waveguide gratings with excellent efficiency and divergence angle
Zhaozhen Chen(陈兆震), Wenling Li(李文玲), Qian Wang(王乾), Enfeng Liu(刘恩峰), Xinqun Zhang(张新群), Jingwei Liu(刘敬伟), and Zhengsheng Han(韩郑生)
Experimental demonstration of silicon nitride waveguide gratings with excellent efficiency and divergence angle
Zhaozhen Chen(陈兆震), Wenling Li(李文玲), Qian Wang(王乾), Enfeng Liu(刘恩峰), Xinqun Zhang(张新群), Jingwei Liu(刘敬伟), and Zhengsheng Han(韩郑生)
中国物理B
.
2025, (5): 54206
-054206
.
DOI: 10.1088/1674-1056/adbbbf