Investigation of reflection anisotropy induced by micropipe defects on the surface of a 4H-SiC single crystal using scanning anisotropy microscopy
Wei Huang(黄威), Jinling Yu(俞金玲), Yu Liu(刘雨), Yan Peng(彭燕),Lijun Wang(王利军), Ping Liang(梁平), Tangsheng Chen(陈堂胜), Xiangang Xu(徐现刚), Fengqi Liu(刘峰奇), and Yonghai Chen(陈涌海)
Investigation of reflection anisotropy induced by micropipe defects on the surface of a 4H-SiC single crystal using scanning anisotropy microscopy
Wei Huang(黄威), Jinling Yu(俞金玲), Yu Liu(刘雨), Yan Peng(彭燕),Lijun Wang(王利军), Ping Liang(梁平), Tangsheng Chen(陈堂胜), Xiangang Xu(徐现刚), Fengqi Liu(刘峰奇), and Yonghai Chen(陈涌海)
中国物理B
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2024, (3): 37801
-037801
.
DOI: 10.1088/1674-1056/acf27f