Impact of annealing temperature on the ferroelectric properties of W/Hf
0.5Zr
0.5O
2/W capacitor
Dao Wang(王岛), Yan Zhang(张岩), Yongbin Guo(郭永斌), Zhenzhen Shang(尚真真), Fangjian Fu(符方健), and Xubing Lu(陆旭兵)
Impact of annealing temperature on the ferroelectric properties of W/Hf
0.5Zr
0.5O
2/W capacitor
Dao Wang(王岛), Yan Zhang(张岩), Yongbin Guo(郭永斌), Zhenzhen Shang(尚真真), Fangjian Fu(符方健), and Xubing Lu(陆旭兵)
中国物理B
.
2023, (9): 97701
-097701
.
DOI: 10.1088/1674-1056/aca9c6