Phosphorus diffusion and activation in fluorine co-implanted germanium after excimer laser annealing
Chen Wang(王尘), Wei-Hang Fan(范伟航), Yi-Hong Xu(许怡红), Yu-Chao Zhang(张宇超), Hui-Chen Fan(范慧晨), Cheng Li(李成), and Song-Yan Cheng(陈松岩)
Phosphorus diffusion and activation in fluorine co-implanted germanium after excimer laser annealing
Chen Wang(王尘), Wei-Hang Fan(范伟航), Yi-Hong Xu(许怡红), Yu-Chao Zhang(张宇超), Hui-Chen Fan(范慧晨), Cheng Li(李成), and Song-Yan Cheng(陈松岩)
中国物理B
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2022, (9): 98503
-098503
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DOI: 10.1088/1674-1056/ac6db3