Surface chemical disorder and lattice strain of GaN implanted by 3-MeV Fe
10+ ions
Jun-Yuan Yang(杨浚源), Zong-Kai Feng(冯棕楷), Ling Jiang(蒋领), Jie Song(宋杰), Xiao-Xun He(何晓珣), Li-Ming Chen(陈黎明), Qing Liao(廖庆), Jiao Wang(王姣), and Bing-Sheng Li(李炳生)
Surface chemical disorder and lattice strain of GaN implanted by 3-MeV Fe
10+ ions
Jun-Yuan Yang(杨浚源), Zong-Kai Feng(冯棕楷), Ling Jiang(蒋领), Jie Song(宋杰), Xiao-Xun He(何晓珣), Li-Ming Chen(陈黎明), Qing Liao(廖庆), Jiao Wang(王姣), and Bing-Sheng Li(李炳生)
中国物理B
.
2022, (4): 46103
-046103
.
DOI: 10.1088/1674-1056/ac373f