Mechanism of defect evolution in H
+ and He
+ implanted InP
Ren-Jie Liu(刘仁杰), Jia-Jie Lin(林家杰), N Daghbouj, Jia-Liang Sun(孙嘉良), Tian-Gui You(游天桂), Peng Gao(高鹏), Nie-Feng Sun(孙聂枫), and Min Liao(廖敏)
Mechanism of defect evolution in H
+ and He
+ implanted InP
Ren-Jie Liu(刘仁杰), Jia-Jie Lin(林家杰), N Daghbouj, Jia-Liang Sun(孙嘉良), Tian-Gui You(游天桂), Peng Gao(高鹏), Nie-Feng Sun(孙聂枫), and Min Liao(廖敏)
中国物理B
.
2021, (8): 86104
-086104
.
DOI: 10.1088/1674-1056/abf640