Numerical and analytical investigations for the SOI LDMOS with alternated high-
k dielectric and step doped silicon pillars
姚佳飞, 郭宇锋, 张振宇, 杨可萌, 张茂林, 夏天
Numerical and analytical investigations for the SOI LDMOS with alternated high-
k dielectric and step doped silicon pillars
Jia-Fei Yao(姚佳飞), Yu-Feng Guo(郭宇锋), Zhen-Yu Zhang(张振宇), Ke-Meng Yang(杨可萌), Mao-Lin Zhang(张茂林), Tian Xia(夏天)
中国物理B
.
2020, (3): 38503
-038503
.
DOI: 10.1088/1674-1056/ab6960