High quality NbTiN films fabrication and rapid thermal annealing investigation
葛欢, 金贻荣, 宋小会
High quality NbTiN films fabrication and rapid thermal annealing investigation
Huan Ge(葛欢), Yi-Rong Jin(金贻荣), Xiao-Hui Song(宋小会)
中国物理B . 2019, (7): 77402 -077402 .  DOI: 10.1088/1674-1056/28/7/077402