Amorphous Si critical dimension structures with direct Si lattice calibration
吴子若, 蔡燕妮, 王星睿, 张龙飞, 邓晓, 程鑫彬, 李同保
Amorphous Si critical dimension structures with direct Si lattice calibration
Ziruo Wu(吴子若), Yanni Cai(蔡燕妮), Xingrui Wang(王星睿), Longfei Zhang(张龙飞), Xiao Deng(邓晓), Xinbin Cheng(程鑫彬), Tongbao Li(李同保)
中国物理B
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2019, (3): 30601
-030601
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DOI: 10.1088/1674-1056/28/3/030601