Fabrication of Al air-bridge on coplanar waveguide
金震川, 吴海腾, 于海峰, 于扬
Fabrication of Al air-bridge on coplanar waveguide
Zhen-Chuan Jin(金震川), Hai-Teng Wu(吴海腾), Hai-Feng Yu(于海峰), Yang Yu(于扬)
中国物理B
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2018, (10): 100310
-100310
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DOI: 10.1088/1674-1056/27/10/100310