Research on the radiation hardened SOI devices with single-step Si ion implantation
戴丽华, 毕大炜, 胡志远, 刘小年, 张梦映, 张正选, 邹世昌
Research on the radiation hardened SOI devices with single-step Si ion implantation
Li-Hua Dai(戴丽华), Da-Wei Bi(毕大炜), Zhi-Yuan Hu(胡志远), Xiao-Nian Liu(刘小年), Meng-Ying Zhang(张梦映), Zheng-Xuan Zhang(张正选), Shi-Chang Zou(邹世昌)
中国物理B
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2018, (4): 48503
-048503
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DOI: 10.1088/1674-1056/27/4/048503