Structural, optical, and electrical properties of Cu-doped ZrO
2 films prepared by magnetron co-sputtering
姚念琦, 刘智超, 顾广瑞, 吴宝嘉
Structural, optical, and electrical properties of Cu-doped ZrO
2 films prepared by magnetron co-sputtering
Nian-Qi Yao(姚念琦), Zhi-Chao Liu(刘智超), Guang-Rui Gu(顾广瑞), Bao-Jia Wu(吴宝嘉)
中国物理B
.
2017, (10): 106801
-106801
.
DOI: 10.1088/1674-1056/26/10/106801
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