Crystalline silicon surface passivation investigated by thermal atomic-layer-deposited aluminum oxide

侯彩霞, 郑新和, 贾锐, 陶科, 刘三姐, 姜帅, 张鹏飞, 孙恒超, 李永涛

Cai-Xia Hou(侯彩霞), Xin-He Zheng(郑新和), Rui Jia(贾锐), Ke Tao(陶科), San-Jie Liu(刘三姐), Shuai Jiang(姜帅), Peng-Fei Zhang(张鹏飞), Heng-Chao Sun(孙恒超), Yong-Tao Li(李永涛)

中国物理B . 2017, (9): 98103 -098103 . DOI: 10.1088/1674-1056/26/9/098103