Growth and characterization of AlN epilayers using pulsed metal organic chemical vapor deposition
吉泽生, 汪连山, 赵桂娟, 孟钰淋, 李方政, 李辉杰, 杨少延, 王占国
Growth and characterization of AlN epilayers using pulsed metal organic chemical vapor deposition
Zesheng Ji(吉泽生), Lianshan Wang(汪连山), Guijuan Zhao(赵桂娟), Yulin Meng(孟钰淋), Fangzheng Li(李方政), Huijie Li(李辉杰), Shaoyan Yang(杨少延), Zhanguo Wang(王占国)
中国物理B
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2017, (7): 78102
-078102
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DOI: 10.1088/1674-1056/26/7/078102