Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors
王磊, 张家琦, 李柳暗, 前田裕太郎, 敖金平
Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors
Lei Wang(王磊), Jiaqi Zhang(张家琦), Liuan Li(李柳暗), Yutaro Maeda(前田裕太郎), Jin-Ping Ao(敖金平)
中国物理B . 2017, (3): 37201 -037201 .  DOI: 10.1088/1674-1056/26/3/037201