Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

王奇, 于晓丽, 王德真

Qi Wang(王奇), Xiao-Li Yu(于晓丽), De-Zhen Wang(王德真)

中国物理B . 2017, (3): 35201 -035201 . DOI: 10.1088/1674-1056/26/3/035201