Crystallization behaviors of ultrathin Al-doped HfO
2 amorphous films grown by atomic layer deposition
马雪丽, 杨红, 项金娟, 王晓磊, 王文武, 张建齐, 殷华湘, 朱慧珑, 赵超
Crystallization behaviors of ultrathin Al-doped HfO
2 amorphous films grown by atomic layer deposition
Xue-Li Ma(马雪丽), Hong Yang(杨红), Jin-Juan Xiang(项金娟), Xiao-Lei Wang(王晓磊), Wen-Wu Wang(王文武), Jian-Qi Zhang(张建齐), Hua-Xiang Yin(殷华湘), Hui-Long Zhu(朱慧珑), Chao Zhao(赵 超)
中国物理B
.
2017, (2): 27701
-027701
.
DOI: 10.1088/1674-1056/26/2/027701