Influences of annealing on structural and compositional properties of Al
2O
3 thin films grown on 4H-SiC by atomic layer deposition
田丽欣, 张峰, 申占伟, 闫果果, 刘兴昉, 赵万顺, 王雷, 孙国胜, 曾一平
Influences of annealing on structural and compositional properties of Al
2O
3 thin films grown on 4H-SiC by atomic layer deposition
Li-Xin Tian(田丽欣), Feng Zhang(张峰), Zhan-Wei Shen(申占伟), Guo-Guo Yan(闫果果), Xing-Fang Liu(刘兴昉), Wan-Shun Zhao(赵万顺), Lei Wang(王雷), Guo-Sheng Sun(孙国胜), Yi-Ping Zeng(曾一平)
中国物理B
.
2016, (12): 128104
-128104
.
DOI: 10.1088/1674-1056/25/12/128104