Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas
赵艳, 高伟, 徐博, 李英爱, 李红东, 顾广瑞, 殷红
Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas
Yan Zhao(赵艳), Wei Gao(高伟), Bo Xu(徐博), Ying-Ai Li(李英爱), Hong-Dong Li(李红东), Guang-Rui Gu(顾广瑞), Hong Yin(殷红)
中国物理B
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2016, (10): 106801
-106801
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DOI: 10.1088/1674-1056/25/10/106801