Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

韩敬华, 罗莉, 张玉波, 胡锐峰, 冯国英

Jinghua Han(韩敬华), Li Luo(罗莉), Yubo Zhang(张玉波), Ruifeng Hu(胡锐峰), Guoying Feng(冯国英)

中国物理B . 2016, (9): 95204 -095204 . DOI: 10.1088/1674-1056/25/9/095204