Improvement in electrical properties of high-
κfilm on Ge substrate by an improved stress relieved pre-oxide method
樊继斌, 丁晓甫, 刘红侠, 谢鹏飞, 张袁涛, 廖清良
Improvement in electrical properties of high-
κfilm on Ge substrate by an improved stress relieved pre-oxide method
Ji-Bin Fan(樊继斌), Xiao-Fu Ding(丁晓甫), Hong-Xia Liu(刘红侠), Peng-Fei Xie(谢鹏飞), Yuan-Tao Zhang(张袁涛), Qing-Liang Liao(廖清良)
中国物理B
.
2016, (2): 27702
-027702
.
DOI: 10.1088/1674-1056/25/2/027702