Mechanical strains in pecvd SiN x:H films for nanophotonic application
O. Semenova, A. Kozelskaya, Li Zhi-Yong, Yu Yu-De
Mechanical strains in pecvd SiN x:H films for nanophotonic application
O. Semenova, A. Kozelskaya, Li Zhi-Yong, Yu Yu-De
中国物理B . 2015, (10): 106801 -106801 .  DOI: 10.1088/1674-1056/24/10/106801