In-situ wafer bowing measurements of GaN grown on Si (111) substrate by reflectivity mapping in metal organic chemical vapor deposition system
杨亿斌, 柳铭岗, 陈伟杰, 韩小标, 陈杰, 林秀其, 林佳利, 罗慧, 廖强, 臧文杰, 陈崟松, 邱运灵, 吴志盛, 刘扬, 张佰君
In-situ wafer bowing measurements of GaN grown on Si (111) substrate by reflectivity mapping in metal organic chemical vapor deposition system
Yang Yi-Bin (杨亿斌), Liu Ming-Gang (柳铭岗), Chen Wei-Jie (陈伟杰), Han Xiao-Biao (韩小标), Chen Jie (陈杰), Lin Xiu-Qi (林秀其), Lin Jia-Li (林佳利), Luo Hui (罗慧), Liao Qiang (廖强), Zang Wen-Jie (臧文杰), Chen Yin-Song (陈崟松), Qiu Yun-Ling (邱运灵), Wu Zhi-Sheng (吴志盛), Liu Yang (刘扬), Zhang Bai-Jun (张佰君)
中国物理B
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2015, (9): 96103
-096103
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DOI: 10.1088/1674-1056/24/9/096103