Development of MEMS-based micro capacitive tactile probe
雷李华, 李源, 范国芳, 吴俊杰, 简黎, 蔡潇雨, 李同保
Development of MEMS-based micro capacitive tactile probe
Lei Li-Hua (雷李华), Li Yuan (李源), Fan Guo-Fang (范国芳), Wu Jun-Jie (吴俊杰), Jian Li (简黎), Cai Xiao-Yu (蔡潇雨), Li Tong-Bao (李同保)
中国物理B
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2014, (11): 118703
-118703
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DOI: 10.1088/1674-1056/23/11/118703