Comparison between N 2 and O 2 anneals on the integrity of an Al 2O 3/Si 3N 4/SiO 2/Si memory gate stack
褚玉琼, 张满红, 霍宗亮, 刘明
Comparison between N 2 and O 2 anneals on the integrity of an Al 2O 3/Si 3N 4/SiO 2/Si memory gate stack
Chu Yu-Qiong (褚玉琼), Zhang Man-Hong (张满红), Huo Zong-Liang (霍宗亮), Liu Ming (刘明)
Chin. Phys. B . 2014, (8): 88501 -088501 .  DOI: 10.1088/1674-1056/23/8/088501