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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating
张林, 马国佳, 林国强, 马贺, 韩克昌
Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating
Zhang Lin (张林), Ma Guo-Jia (马国佳), Lin Guo-Qiang (林国强), Ma He (马贺), Han Ke-Chang (韩克昌)
中国物理B . 2014, (
4
): 48102 -048102 . DOI: 10.1088/1674-1056/23/4/048102