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Residual compressive stress and intensity of infrared absorption of cubic BN films prepared by plasma enhanced chemical vapor deposition
杨杭生, 金盼盼, 徐亚伯, 李海洋
Residual compressive stress and intensity of infrared absorption of cubic BN films prepared by plasma enhanced chemical vapor deposition
Yang Hang-Sheng (杨杭生), Jin Pan-Pan (金盼盼), Xu Ya-Bo (徐亚伯), Li Hai-Yang (李海洋)
中国物理B . 2014, (
3
): 37201 -037201 . DOI: 10.1088/1674-1056/23/3/037201