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Synthesis of TiN/a-Si
3
N
4
thin film by using a Mather type dense plasma focus system
T. Hussain, R. Ahmad, N. Khalid, Z. A. Umar, A. Hussnain
Synthesis of TiN/a-Si
3
N
4
thin film by using a Mather type dense plasma focus system
T. Hussain, R. Ahmad, N. Khalid, Z. A. Umar, A. Hussnain
中国物理B . 2013, (
5
): 55204 -055204 . DOI: 10.1088/1674-1056/22/5/055204