High efficiency grating couplers based on shared process with CMOS MOSFETs
仇超, 盛振, 李乐, 彭树根, 武爱民, 王曦, 邹世昌, 甘甫烷
High efficiency grating couplers based on shared process with CMOS MOSFETs
Qiu Chao (仇超), Sheng Zhen (盛振), Li Le (李乐), Albert Pang (彭树根), Wu Ai-Min (武爱民), Wang Xi (王曦), Zou Shi-Chang (邹世昌), Gan Fu-Wan (甘甫烷)
中国物理B
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2013, (2): 24212
-024212
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DOI: 10.1088/1674-1056/22/2/024212