Ultra-low specific on-resistance vertical double-diffused metal-oxide semiconductor with a high-
k dielectric-filled extended trench
王沛, 罗小蓉, 蒋永恒, 王琦, 周坤, 吴丽娟, 王骁玮, 蔡金勇, 罗尹春, 范叶, 胡夏融, 范远航, 魏杰, 张波
Ultra-low specific on-resistance vertical double-diffused metal-oxide semiconductor with a high-
k dielectric-filled extended trench
Wang Pei (王沛), Luo Xiao-Rong (罗小蓉), Jiang Yong-Heng (蒋永恒), Wang Qi (王琦), Zhou Kun (周坤), Wu Li-Juan (吴丽娟), Wang Xiao-Wei (王骁玮), Cai Jin-Yong (蔡金勇), Luo Yin-Chun (罗尹春), Fan Ye (范叶), Hu Xia-Rong (胡夏融), Fan Yuan-Hang (范远航), Wei Jie (魏杰), Zhang Bo (张波)
中国物理B
.
2013, (2): 27305
-027305
.
DOI: 10.1088/1674-1056/22/2/027305