Mechanism of amorphous Ge
2Sb
2Te
5 removal during chemical mechanical planarization in acidic H
2O
2 slurry
何敖东, 宋志棠, 刘波, 钟旻, 王良咏, 吕业刚, 封松林
Mechanism of amorphous Ge
2Sb
2Te
5 removal during chemical mechanical planarization in acidic H
2O
2 slurry
He Ao-Dong (何敖东), Song Zhi-Tang (宋志棠), Liu Bo (刘波), Zhong Min (钟旻), Wang Liang-Yong (王良咏), Lü Ye-Gang (吕业刚), Feng Song-Lin (封松林)
Chin. Phys. B
.
2013, (1): 18503
-018503
.
DOI: 10.1088/1674-1056/22/1/018503