Nano-scale gap filling and mechanism of deposit–etch–deposit process for phase-change material
任万春, 刘波, 宋志棠, 向阳辉, 王宗涛, 张北超, 封松林
Nano-scale gap filling and mechanism of deposit–etch–deposit process for phase-change material
Ren Wan-Chun (任万春), Liu Bo (刘波), Song Zhi-Tang (宋志棠), Xiang Yang-Hui (向阳辉), Wang Zong-Tao (王宗涛), Zhang Bei-Chao (张北超), Feng Song-Lin (封松林 )
中国物理B
.
2012, (11): 115203
-115203
.
DOI: 10.1088/1674-1056/21/11/115203