Improvement of fabrication and characterization methods for micromechanical disk resonators

赵晖, 骆伟, 郑海洋, 杨晋玲, 杨富华

Zhao Hui (赵晖), Luo Wei (骆伟), Zheng Hai-Yang (郑海洋), Yang Jin-Ling (杨晋玲), Yang Fu-Hua (杨富华)

中国物理B . 2012, (10): 100702 -100702 . DOI: 10.1088/1674-1056/21/10/100702