Breakdown voltage model and structure realization of a thin silicon layer with linear variable doping on a silicon on insulator high voltage device with multiple step field plates
乔明, 庄翔, 吴丽娟, 章文通, 温恒娟, 张波, 李肇基
Breakdown voltage model and structure realization of a thin silicon layer with linear variable doping on a silicon on insulator high voltage device with multiple step field plates
Qiao Ming (乔明), Zhuang Xiang (庄翔), Wu Li-Juan (吴丽娟), Zhang Wen-Tong (章文通), Wen Heng-Juan (温恒娟), Zhang Bo (张波), Li Zhao-Ji (李肇基)
中国物理B
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2012, (10): 108502
-108502
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DOI: 10.1088/1674-1056/21/10/108502