Mixed polarization in determining the film thickness of a silicon sphere by spectroscopic ellipsometry

张继涛, 吴学健, 李岩

Zhang Ji-Tao(张继涛), Wu Xue-Jian(吴学健), and Li Yan(李岩)

中国物理B . 2012, (1): 10701 -010701 . DOI: 10.1088/1674-1056/21/1/010701