Study on the defect-related emissions in the light self-ion-implanted Si films by a silicon-on-insulator structure
王茺, 杨宇, 杨瑞东, 李亮, 熊飞, Bao Ji-Ming
Study on the defect-related emissions in the light self-ion-implanted Si films by a silicon-on-insulator structure
Wang Chong(王茺), Yang Yu(杨宇), Yang Rui-Dong(杨瑞东), Li Liang(李亮), Xiong Fei(熊飞), and Bao Ji-Ming
中国物理B
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2011, (2): 26802
-026802
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DOI: 10.1088/1674-1056/20/2/026802