Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

虞一青, 辛煜, 宁兆元

Yu Yi-Qing(虞一青), Xin Yu(辛煜), and Ning Zhao-Yuan(宁兆元)

中国物理B . 2011, (1): 15207 -015207 . DOI: 10.1088/1674-1056/20/1/015207