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Effect of
E
×
B
electron drift and plasma discharge in dc magnetron sputtering plasma
Sankar Moni Borah, Arup Ratan Pal, Heremba Bailung, Joyanti Chutia
Effect of
E
×
B
electron drift and plasma discharge in dc magnetron sputtering plasma
Sankar Moni Borah,Arup Ratan Pal,Heremba Bailung,andJoyanti Chutia
中国物理B . 2011, (
1
): 14701 -014701 . DOI: 10.1088/1674-1056/20/1/014701