Reduction of the phosphorus contamination for plasma deposition of p–i–n microcrystalline silicon solar cells in a single chamber
王光红, 张晓丹, 许盛之, 郑新霞, 魏长春, 孙建, 熊绍珍, 耿新华, 赵颖
Reduction of the phosphorus contamination for plasma deposition of p–i–n microcrystalline silicon solar cells in a single chamber
Wang Guang-Hong(王光红), Zhang Xiao-Dan(张晓丹), Xu Sheng-Zhi(许盛之), Zheng Xin-Xia(郑新霞), Wei Chang-Chun(魏长春), Sun Jian(孙建), Xiong Shao-Zhen(熊绍珍), Geng Xin-Hua(耿新华), and Zhao Ying(赵颖)
中国物理B
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2010, (9): 98102
-098102
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DOI: 10.1088/1674-1056/19/9/098102