Multi-wafer 3C–SiC heteroepitaxial growth on Si(100) substrates
孙国胜, 刘兴昉, 王雷, 赵万顺, 杨挺, 吴海雷, 闫果果, 赵永梅, 宁瑾, 曾一平, 李晋闽
Multi-wafer 3C–SiC heteroepitaxial growth on Si(100) substrates
Sun Guo-Sheng(孙国胜), Liu Xing-Fang(刘兴昉), Wang Lei(王雷), Zhao Wan-Shun(赵万顺),Yang Ting(杨挺), Wu Hai-Lei(吴海雷), Yan Guo-Guo(闫果果), Zhao Yong-Mei(赵永梅), Ning Jin(宁瑾), Zeng Yi-Ping(曾一平), and Li Jin-Min(李晋闽)
中国物理B
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2010, (8): 88101
-088101
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DOI: 10.1088/1674-1056/19/8/088101