The study of amorphous incubation layers during the growth of microcrystalline silicon films under different deposition conditions
陈永生, 徐艳华, 谷锦华, 卢景霄, 杨仕娥, 郜小勇
The study of amorphous incubation layers during the growth of microcrystalline silicon films under different deposition conditions
Chen Yong-Sheng(陈永生), Xu Yan-Hua(徐艳华), Gu Jin-Hua(谷锦华), Lu Jing-Xiao(卢景霄), Yang Shi-E(杨仕娥), and Gao Xiao-Yong(郜小勇)
中国物理B
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2010, (8): 87206
-087206
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DOI: 10.1088/1674-1056/19/8/087206