Quantitative measurement of local elasticity of SiO x film by atomic force acoustic microscopy
何存富, 张改梅, 吴斌
Quantitative measurement of local elasticity of SiO x film by atomic force acoustic microscopy
He Cun-Fu(何存富), Zhang Gai-Mei(张改梅), and Wu Bin(吴斌)
中国物理B . 2010, (8): 84302 -084302 .  DOI: 10.1088/1674-1056/19/8/084302