Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target

刘成森, 韩宏颖, 彭晓晴, 昶叶, 王德真

Liu Cheng-Sen(刘成森), Han Hong-Ying(韩宏颖), Peng Xiao-Qing(彭晓晴), Chang Ye(昶叶), and Wang De-Zhen(王德真)

中国物理B . 2010, (3): 35201 -035201 . DOI: 10.1088/1674-1056/19/3/035201